磁过滤电弧离子镀TiN与N离子注入性能研究

付天佐, 赵红, 田振刚, 李晓其, 谢宛鋆

Performance of TiN Coating and N Ion Implantation by Magnetic Filtered Arc Ion Plating

FU Tianzuo, ZHAO Hong, TIAN Zhengang, LI Xiaoqi, XIE Wanyun

表面技术 . 2024, (14): 139 -145 . DOI: 10.16490/j.cnki.issn.1001-3660.2024.14.012