紫外光催化辅助Ga面GaN化学机械抛光试验研究

杨友明, 周海, 胡士响, 夏丽琴, 任相璞

Ultraviolet Photocatalysis Assisted Chemical Mechanical Polishing of GaN Surface

YANG Youming, ZHOU Hai, HU Shixiang, XIA Liqin, REN Xiangpu

表面技术 . 2024, (6): 157 -167 . DOI: 10.16490/j.cnki.issn.1001-3660.2024.06.014