本底真空度对磁控溅射法制备 AZO 薄膜的影响

霍红英, 常会, 邹敏, 马光强

Influence of the Base Pressure on AZO Film Deposited by Magnetron Sputter Method

HUO Hong-ying, CHANG Hui, ZOU Min, MA Guang-qiang

表面技术 . 2013, (1): 75 -77 .