工作气压对管内壁沉积Si/O-DLC薄膜结构与性能的影响
许浩杰, 陈仁德, 周广学, 叶羽敏, 汪爱英
#$NP Effect of Working Pressure on Structure and Properties of Si/O-DLC Films Deposited on Inner Wall of the Tube
XU Hao-jie, CHEN Ren-de, ZHOU Guang-xue, YE Yu-min, WANG Ai-ying
表面技术
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2023, (6): 439
-499
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DOI: 10.16490/j.cnki.issn.1001-3660.2023.06.041
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