GaN晶片电化学腐蚀表面摩擦磨损特性

严杰文, 阎秋生, 潘继生

Friction and Wear Characteristics of Electrochemically Corroded Surfaces of GaN Wafers

YAN Jie-wen, YAN Qiu-sheng, PAN Ji-sheng

表面技术 . 2023, (6): 208 -222 . DOI: 10.16490/j.cnki.issn.1001-3660.2023.06.018