碳含量对中频磁控溅射沉积MoCN涂层微观结构及摩擦学性能的影响
李卫, 李德香, 鲁志杰, 刘叶诚, 吕笑文, 徐志彪
Effect of Carbon Content on the Microstructure and Tribological Properties of MoCN Nanocomposite Coating Prepared by Medium Frequency Magnetron Sputtering
LI Wei, LI De-xiang, LU Zhi-jie, LIU Ye-cheng, LYU Xiao-wen, XU Zhi-biao
表面技术
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2023, (4): 184
-191
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DOI: 10.16490/j.cnki.issn.1001-3660.2023.04.015
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