纵扭超声辅助磨削氮化硅亚表面损伤及其试验研究
闫艳燕, 马千里, 张亚飞, 秦飞跃, 赵波
Subsurface Damage and Experiment of Silicon Nitride by Longitudinal Torsional Ultrasonic Assisted Grinding
YAN Yan-yan, MA Qian-li, ZHANG Ya-fei, QIN Fei-yue, ZHAO Bo
表面技术
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2023, (2): 55
-66
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DOI: 10.16490/j.cnki.issn.1001-3660.2023.02.006