飞秒激光全划切超薄碳化硅基片

张炜, 刘涛, 何家乐, 张家发, 张宇梁, 龙江游, 谢小柱

Full Dicing of Ultra-thin Silicon Carbide Substrate by Femtosecond Laser

ZHANG Wei, LIU Tao, HE Jia-le, ZHANG Jia-fa, ZHANG Yu-liang, LONG Jiang-you, XIE Xiao-zhu

表面技术 . 2023, (1): 306 -313 . DOI: 10.16490/j.cnki.issn.1001-3660.2023.01.031