氮含量对Mo-Ta-W-N多主元合金氮化物薄膜的影响

张毅勇, 井致远, 张志彬, 梁秀兵

Effects of Nitrogen Content on Mo-Ta-W-N Multi-principal Alloy Nitride Thin Films

ZHANG Yi-yong, JING Zhi-yuan, ZHANG Zhi-bin, LIANG Xiu-bing

表面技术 . 2023, (1): 21 -28 . DOI: 10.16490/j.cnki.issn.1001-3660.2023.01.002