金刚石薄膜在第一壁材料表面的应力研究

耿传文, 赵鹏, 张晓东, 曾梅花, Miroljub Vilotijevic

The Stress of Diamond Films on the Surface of the First Wall Material

GENG Chuan-wen, ZHAO Peng, ZHANG Xiao-dong, ZENG Mei-hua, Miroljub，Vilotijevic

表面技术 . 2022, (10): 243 -249 . DOI: 10.16490/j.cnki.issn.1001-3660.2022.10.025