1 064 nm激光高反膜残余应力及其形变分析

李阳, 徐均琪, 苏俊宏, 袁松松, 刘祺, 刘政

Residual Stress and Deformation of 1 064 nm High Reflection Films for Laser Systems

LI Yang, XU Jun-qi, SU Jun-hong, YUAN Song-song, LIU Qi, LIU Zheng

表面技术 . 2022, (9): 311 -318, 334 . DOI: 10.16490/j.cnki.issn.1001-3660.2022.09.032