非晶含氢碳薄膜本征结构对退火行为的影响
贾倩, 张斌, 赖振国, 张俊彦
Annealing Treatment of Hydrogenated Amorphous Carbon Film is Affected by Its Intrinsic Structure
JIA Qian, ZHANG Bin, LAI Zhen-guo, ZHANG Jun-yan
表面技术
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2022, (7): 98
-106
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DOI: 10.16490/j.cnki.issn.1001-3660.2022.07.009