掺杂元素Ti对WS2薄膜结构和摩擦学性能的影响

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The Influence of Doped Ti Element on Structure and Tribological Properties of WS2 Film

ZHANG Zhao-yun, DUAN Ze-wen, JIANG Hai-xia, ZHANG Bei-bei, ZHAO Xiao-yu, WU You-zhi, WANG Peng

表面技术 . 2022, (6): 239 -247, 266 . DOI: 10.16490/j.cnki.issn.1001-3660.2022.06.021