易解理氧化镓晶片的半固结研磨工艺

蒋网, 周海, 计健, 任相璞, 朱子岩

Semi-Consolidated Grinding Process of Easily Cleaved Gallium Oxide Wafer

JIANG Wang, ZHOU Hai, JI Jian, REN Xiang-pu, ZHU Zi-yan

表面技术 . 2022, (3): 178 -185, 198 . DOI: 10.16490/j.cnki.issn.1001-3660.2022.03.018