脉冲偏压频率对TiSiN/TiAlN纳米多层膜结构和性能的影响规律

魏永强, 游业豪, 蒋志强

Effects of Pulse Bias Frequency on the Microstructure andProperties of TiSiN/TiAlN Nano-Multilayer Films

WEI Yong-qiang, YOU Ye-hao, JIANG Zhi-qiang

表面技术 . 2021, (12): 311 -319 . DOI: 10.16490/j.cnki.issn.1001-3660.2021.12.030