单层磨料凝胶抛光垫的加工性能研究

单层磨料凝胶抛光垫的加工性能研究

罗求发, 陆静, 林莹超, 俞能跃

Study on the Processing Property of Monolayer Abrasive Sol-Gel Polishing Pad

LUO Qiu-fa, LU Jing, LIN Ying-chao, YU Neng-yue

表面技术 . 2021, (12): 101 -110 . DOI: 10.16490/j.cnki.issn.1001-3660.2021.12.010