新型高硬度硅溶胶的制备及其在化学机械抛光中的应用
孙运乾, 李薇薇, 赵之琳, 钱佳
Preparation of New High-hardness Silica Sol and Its Application in Chemical Mechanical Polishing
SUN Yun-qian, LI Wei-wei, ZHAO Zhi-lin, QIAN Jia
表面技术
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2021, (11): 383
-389
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DOI: 10.16490/j.cnki.issn.1001-3660.2021.11.041