晶面对单晶硅高功率绿光飞秒激光加工的影响
张欣, 黄婷, 肖荣诗
Effect of Crystal Orientation on High Power Green Femtosecond Laser Processing of Single Crystal Silicon
ZHANG Xin, HUANG Ting, XIAO Rong-shi
表面技术
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2021, (11): 362
-371
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DOI: 10.16490/j.cnki.issn.1001-3660.2021.11.039