基于磁控磨料定向的SiC固相芬顿反应研抛盘制备及性能研究
路家斌, 曾帅, 阎秋生, 熊强, 邓家云
Study on the Preparation and Lapping Performance of SiC Solid-state Fenton Reaction Lapping-polishing Plates Based on Magnetically Controlled Abrasive Orientation
LU Jia-bin, ZENG Shuai, YAN Qiu-sheng, XIONG Qiang, DENG Jia-yun
表面技术
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2021, (10): 353
-362
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DOI: 10.16490/j.cnki.issn.1001-3660.2021.10.037
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