偏压对四面体非晶碳膜结构和性能的影响
李洪, 李玉婷, 林松盛, 石倩, 郭朝乾, 苏一凡, 代明江
Effect of Bias Voltage on Structure and Properties of Tetrahedral Amorphous Carbon Film
LI Hong, LI Yu-ting, LIN Song-sheng, SHI Qian, GUO Chao-qian, SU Yi-fan, DAI Ming-jiang
表面技术
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2021, (3): 284
-292
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DOI: 10.16490/j.cnki.issn.1001-3660.2021.03.030