HiPIMS技术低温沉积CrN薄膜结构及性能研究

贵宾华, 周晖, 郑军, 杨拉毛草, 张延帅, 汪科良

Microstructure and Properties of CrN Films Prepared by HiPIMS at Low Temperature

GUI Bin-hua, ZHOU Hui, ZHENG Jun, Yang-La-mao-cao, ZHANG Yan-shuai, WANG Ke-liang

表面技术 . 2020, (12): 199 -208 . DOI: 10.16490/j.cnki.issn.1001-3660.2020.12.023