基于FIB/SEM双束系统的原位、实时观测三点弯曲薄膜测试方法
刘兴光, 张凯锋, 周晖
In-situ Three-point Bending Test Method with Real-time Observation Based on FIB-SEM System
LIU Xing-guang, ZHANG Kai-feng, ZHOU Hui
表面技术
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2020, (11): 351
-357
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DOI: 10.16490/j.cnki.issn.1001-3660.2020.11.041
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