利用FFV预测缓蚀剂在不同体系中的协同效应
陆原, 赵景茂, 李明杰, 张晨, Vahdat Zahedi Asl, Yahya Palizdar, 樊保民
Prediction on Synergistic Effect of Inhibitors in Different Systems by Fractional Free Volumes
LU Yuan, ZHAO Jing-mao, LI Ming-jie, ZHANG Chen, Vahdat Zahedi Asl, Yahya Palizdar, FAN Bao-min
表面技术
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2020, (11): 58
-65
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DOI: 10.16490/j.cnki.issn.1001-3660.2020.11.007