单晶GaN平面研磨及材料脆塑性去除评估方法研究

罗斌, 张龙, 焦振华, 柴京富, 罗金星

Planar Lapping of Single-crystal GaN and Assessment Method for Brittle-plastic Material Removal

LUO Bin, ZHANG Long, JIAO Zhenhua, CHAI Jingfu, LUO Jinxing

表面技术 . 2025, (16): 141 -155 . DOI: 10.16490/j.cnki.issn.1001-3660.2025.16.012