硅烷流量对钛合金双极板表面改性碳膜性能的影响

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Effect of Silane Flow Rate on the Properties of Modified Carbon Film on the Surface of Titanium Alloy Bipolar Plate

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表面技术 . 2020, (6): 76 -84 . DOI: 10.16490/j.cnki.issn.1001-3660.2020.06.009