基于稳定固溶体团簇模型的无扩散阻挡Cu合金薄膜的成分设计

杨冕, 利助民, 李晓娜, 李南军, 郑月红, 朱瑾, 董闯

Composition Design of Barrierless Cu Alloy Films Based on the Stable Solid Solution Cluster Model

YANG Mian, LI Zhu-min, LI Xiao-na, LI Nan-jun, ZHENG Yue-hong, Jinn P. Chu, DONG Chuang

表面技术 . 2020, (5): 48 -60 . DOI: 10.16490/j.cnki.issn.1001-3660.2020.05.006