半导体Fe-Si非晶薄膜的成分解析及设计
张君仪, 李晓娜, 利助民, 毕林霞, 郑月红, 董闯
Composition Analysis and Design of Semiconductor Fe-Si Amorphous Thin Film
ZHANG Jun-yi, LI Xiao-na, LI Zhu-min, BI Lin-xia, ZHENG Yue-hong, DONG Chuang
表面技术
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2020, (5): 39
-47
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DOI: 10.16490/j.cnki.issn.1001-3660.2020.05.005