高分散氧化铝磨粒抛光液实现不锈轴承钢高效化学机械抛光研究
田毅铭, 彭武茂, 王荣沛, 李新竹, 李昕, 石智康, 张韶华, 江亮, 钱林茂
High-efficiency Chemical Mechanical Polishing of Stainless Bearing Steel with the Highly-dispersed Al2O3 Abrasive Slurry
TIAN Yiming, PENG Wumao, WANG Rongpei, LI Xinzhu, LI Xin, SHI Zhikang, ZHANG Shaohua, JIANG Liang, QIAN Linmao
表面技术
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2025, (16): 121
-130
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DOI: 10.16490/j.cnki.issn.1001-3660.2025.16.010
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