沉积压力对磁控溅射WS2薄膜摩擦学性能的影响

贺江涛, 蔡海潮, 薛玉君

Effect of Deposition Pressure on Tribological Properties of WS2 Films by Magnetron Sputtering

HE Jiang-tao, CAI Hai-chao, XUE Yu-jun

表面技术 . 2020, (4): 180 -187 . DOI: 10.16490/j.cnki.issn.1001-3660.2020.04.020