单晶SiC化学机械抛光基础研究——电芬顿反应条件优化及6H-SiC氧化效果分析
邓家云, 潘继生, 阎秋生
Basic Research on Chemical Mechanical Polishing of Single Crystal SiC—Optimization of Electro-Fenton Reaction Conditions and Analysis of 6H-SiC Oxidation Effect
DENG Jia-yun, PAN Ji-sheng, YAN Qiu-sheng
表面技术
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2020, (4): 64
-73
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DOI: 10.16490/j.cnki.issn.1001-3660.2020.04.008
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