偏压对MPP制备AlTiSiN纳米复合涂层结构及性能的影响

贵宾华, 周晖, 郑军, 马占吉, 杨拉毛草, 张延帅

Influence of Bias Voltage on Microstructure and Properties of AlTiSiN Nanocomposite Coatings Prepared by MPP

GUI Bin-hua, ZHOU Hui, ZHENG Jun, MA Zhan-ji, YANG La-mao-cao, ZHANG Yan-shuai

表面技术 . 2020, (1): 228 -236 . DOI: 10.16490/j.cnki.issn.1001-3660.2020.01.027