不同氮气流量AlCrTaTiZr高熵合金氮化物薄膜扩散阻挡性能研究

蒋春霞, 李荣斌, 王馨, 聂朝阳, 居健

Diffusion Barrier Properties of AlCrTaTiZr High-entropy Alloy Nitride Films with Different Nitrogen Flow Rates

JIANG Chun-xia, LI Rong-bin, WANG Xin, NIE Zhao-yang, JU Jian

表面技术 . 2019, (10): 163 -171 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.10.020