高功率脉冲磁控溅射制备的TiN薄膜应力释放及其结合稳定性研究
唐鑫, 马东林, 陈畅子, 冷永祥, 黄楠
Stress Release and Adhesion Stability of TiN Films Deposited by High Power Pulsed Magnetron Sputtering
TANG Xin, MA Dong-lin, CHEN Chang-zi, LENG Yong-xiang, HUANG Nan
表面技术
.
2019, (9): 245
-251
.
DOI: 10.16490/j.cnki.issn.1001-3660.2019.09.028