三靶共溅射纳米复合Cr-Al-Si-N涂层的制备及摩擦学性能研究
王铁钢, 蒙德强, 李柏松, 赵彦辉, 刘艳梅, 姜肃猛
Preparation and Tribological Properties of Cr-Al-Si-N Nanocomposite Coatings by Three Target Co-sputtering
WANG Tie-gang, MENG De-qiang, LI Bai-song, ZHAO Yan-hui, LIU Yan-mei, JIANG Su-meng
表面技术 . 2019, (9): 78 -86 .  DOI: 10.16490/j.cnki.issn.1001-3660.2019.09.007