高功率脉冲磁控溅射制备非晶碳薄膜研究进展
左潇, 孙丽丽, 汪爱英, 柯培玲
Research Progress on Preparation of Amorphous Carbon Thin Films by High Power Impulse Magnetron Sputtering
ZUO Xiao, SUN Li-li, WANG Ai-ying, KE Pei-ling
表面技术
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2019, (9): 53
-63
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DOI: 10.16490/j.cnki.issn.1001-3660.2019.09.004