高功率调制脉冲磁控溅射沉积NbN涂层特征工艺参数研究
李玉阁, 袁海, 蒋智韬, 雷明凯
Characteristic Process Parameters of NbN Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering
LI Yu-ge, YUAN Hai, JIANG Zhi-tao, LEI Ming-kai
表面技术
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2019, (8): 302
-308
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DOI: 10.16490/j.cnki.issn.1001-3660.2019.08.040