催化剂浓度对6H-SiC晶片Si面化学机械抛光性能的影响

滕康, 陈国美, 倪自丰, 钱善华, 白亚雯

Effect of Catalyst Concentration on Chemical Mechanical Polishing Performance of Si Surface of 6H-SiC Wafer

TENG Kang, CHEN Guo-mei, NI Zi-feng, QIAN Shan-hua, BAI Ya-wen

表面技术 . 2019, (3): 291 -296 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.03.039