氩离子轰击对中频-直流磁控溅射铝薄膜耐蚀性能的影响
王付胜, 何鹏, 郁佳琪, 胡隆伟, 刘燕, 陈亚军
Effects of Argon Ion Bombardment on Corrosion Resistance of Al Film Deposited by Medium Frequency Direct Current Magnetron Sputtering
WANG Fu-sheng, HE Peng, YU Jia-qi, HU Long-wei, LIU Yan, CHEN Ya-jun
表面技术
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2019, (3): 185
-194
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DOI: 10.16490/j.cnki.issn.1001-3660.2019.03.026