N2气流量比对磁控溅射Mo-N涂层结构和性能的影响

齐东丽, 宋健宇, 沈龙海

Effect of N2 Flow Ratio on Structure and Property of Mo-N Coatings Deposited by Magnetron Sputtering

QI Dong-li, SONG Jian-yu, SHEN Long-hai

表面技术 . 2019, (2): 173 -178 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.02.025