PECVD制备DLC复合薄膜性能及模具应用

张而耕, 陈强

Properties of DLC Composite Films Prepared by PECVD and Application of Mold

ZHANG Er-geng, CHEN Qiang

表面技术 . 2019, (1): 298 -304 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.01.039