Ti/Al过渡层对共掺杂类金刚石薄膜性能的影响

周永, 孔翠翠, 李晓伟, 孙丽丽, 郭鹏, 周佳, 李玉宏, 李文献, 汪爱英, 柯培玲

Effect of Ti/Al Transition Layer on Properties of Co-doped Diamond-like Carbon Films

ZHOU Yong, KONG Cui-cui, LI Xiao-wei, SUN Li-li, GUO Peng, ZHOU Jia, LI Yu-hong, LI Wen-xian, WANG Ai-ying, KE Pei-ling

表面技术 . 2019, (1): 268 -275 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.01.035