金刚石上不同晶体结构Y2O3膜性质与增透性能研究

陈良贤, 刘金龙, 冯寅楠, 闫雄伯, 安康, 魏俊俊, 李成明

Properties and Anti-reflection Performance of Y2O3 Films with Different Crystal Structures on Diamond

CHEN Liang-xian, LIU Jin-long, FENG Yin-nan, YAN Xiong-bo, AN Kang, WEI Jun-jun, LI Cheng-ming

表面技术 . 2019, (1): 133 -140 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.01.017