GaSb半导体材料表面的化学蚀刻研究进展

张哲, 赵江赫, 张铭, 熊青昀, 熊金平

Research Progress of Chemical Etching on the Surface of GaSb Semiconductor Material

ZHANG Zhe, ZHAO Jiang-he, ZHANG Ming, XIONG Qing-yun, XIONG Jin-ping

表面技术 . 2019, (1): 114 -125 . DOI: 10.16490/j.cnki.issn.1001-3660.2019.01.015