N2流量比对复合磁控溅射Zr-B-N薄膜结构和性能的影响

王铁钢, 郭玉垚, 唐宽瑜, 刘艳梅, 林伟, 姜肃猛

Influence of Nitrogen Flow on Structure and Performance of the Zr-B-N Films Prepared by Hybrid Magnetron Sputtering Techniques

WANG Tie-gang, GUO Yu-yao, TANG Kuan-yu, LIU Yan-mei, LIN Wei, JIANG Su-meng

表面技术 . 2018, (11): 210 -217 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.11.030