甲烷与氢气的流量比在高功率下对金刚石膜生长的影响

翁俊, 周程, 刘繁, 汪建华

Influence of the Gas Flow Ratio between CH4 and H2 on the Growth of Diamond Films at High Microwave Power

WENG Jun, ZHOU Cheng, LIU Fan, WANG Jian-hua

表面技术 . 2018, (11): 202 -209 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.11.029