元素掺杂类金刚石碳膜降内应力研究综述

孙德恩, Sam Zhang (新加坡)

Internal Stress Reduction in Diamond-like Carbon Coatings via Elemental Doping: A Review

SUN De-en, Sam ZHANG (Singapore)

表面技术 . 2018, (6): 95 -103 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.06.015