MPCVD类金刚石膜抗氧化和摩擦性能的研究

MPCVD类金刚石膜抗氧化和摩擦性能的研究

龚耀庭, 彭先

Anti-oxidation and Tribology Properties of MPCVD DLC Films

GONG Yao-ting, PENG Xian

表面技术 . 2018, (2): 136 -143 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.02.022