CO2-CH4沉积气氛中金刚石膜晶粒尺寸的控制研究

翁俊, 刘繁, 孙祁, 汪建华

Investigation on the Grain Size Control of Diamond Films in CO2-CH4 Gas Mixture

WENG Jun, LIU Fan, SUN Qi, WANG Jian-hua

表面技术 . 2018, (1): 211 -217 . DOI: 10.16490/j.cnki.issn.1001-3660.2018.01.033