溅射靶功率对W-C:H薄膜结构与摩擦学性能的影响

孙尚琪, 刘翔, 王永欣, 李金龙, 王立平

Effect of Sputtering Target Power on Structure and Tribological Properties of W-C:H Films

SUN Shang-qi, LIU Xiang, WANG Yong-xin, LI Jing-long, WANG Li-ping

表面技术 . 2017, (11): 104 -109 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.11.015