溅射方法和基体材料对氧化钛薄膜微观结构的影响

纪律, 汪庆, 马东林, 谢东, 程丹, 景凤娟, 黄楠

Effects of Sputtering Techniques and Substrate Materials on Microstructure of Titanium Oxide Films

JI Lyu, WANG Qing, MA Dong-lin, XIE Dong, CHENG Dan, JING Feng-juan, HUANG Nan

表面技术 . 2017, (9): 73 -80 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.09.012